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The oscillatory behavior of doubly clamped microgyroscopes under electrostatic actuation and detection

Mojahedi, M ; Sharif University of Technology | 2013

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  1. Type of Document: Article
  2. DOI: 10.1115/DETC2013-12202
  3. Publisher: American Society of Mechanical Engineers , 2013
  4. Abstract:
  5. In MEMS gyroscopes, it is essential to use matched resonance frequencies of the drive and sense vibrational modes for improving the sensitivity. For this end, the natural frequencies can be tuned by voltages. In this study, a new model is utilized to determine the natural frequencies of the doubly clamped beam microgyroscope. In the model, nonlinear electrostatic forces, fringing fields and mid-plane stretching of thebeam are considered. The system is actuated and sensed by electrostatic force and its natural frequencies and stiffness are detuned by DC voltages. The oscillatory problem of the gyroscope is analytically solved versus DC voltages for different design parameters. Copyright
  6. Keywords:
  7. Doubly clamped microbeam ; Electrostatic forces ; Microgyroscope ; Mid-plane stretching ; Oscillatory behavior ; Electrostatic actuators ; Electrostatic devices ; Electrostatic force ; Gyroscopes ; Nanosystems ; Natural frequencies ; Design parameters ; Doubly clamped beam ; Electrostatic actuation ; Oscillatory behaviors ; Resonance frequencies ; Vibrational modes ; Design
  8. Source: Proceedings of the ASME Design Engineering Technical Conference ; Volume 1 , 2013 ; 9780791855843 (ISBN)
  9. URL: http://proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1830142