Sharif Digital Repository

In this paper, vibration suppression of micro-or nano-scale beams subjected to nonlinear distributed electrostatic force is studied. For the sake of precision, we use the beam model derived from strain gradient elasticity theory aimed at prediction of size effect. In addition, the electrostatic force is considered with first order fringing field correction. The continuous model of the strain gradient beam is truncated by using Kantorovich method as a semi-analytical finite element method. A boundary control feedback law is proposed to suppress forced vibrations of the beam. Both measurements and actuations are taken place in the boundary to avoid spillover instabilities. Simulation results... 

Developing a transient fully-meshed model of coupled-domain microsystems is of paramount importance not only for accurate simulation and design but also for creating more accurate low-order or macro dynamic models. So in this paper, a complete nonlinear finite element model for coupled-domain MEMS devices considering electrostatic and squeeze film effects is presented. For this purpose, we use the Galerkin weighted-residual technique for developing the finite element model that capture the original microsystem's nonlinear behaviors, such as the structural dynamics, the squeeze-film damping, the electrostatic actuation and the geometric nonlinearity caused by inherent residual stresses. In... 

The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer. In this paper, a systematic method for deriving dynamic equation of microcantilevers under electrostatic force is presented. This model covers the behavior of the microcantilevers before and after the pull-in including the effects of van der Waals force, squeeze-film damping, and contact bounce. First, a polynomial approximate shape function with a time-dependent variable for each configuration is defined. Using Hamilton's principle, dynamic equations of microcantilever in all configurations have been derived. Comparison between modeling... 

In MEMS gyroscopes, it is essential to use matched resonance frequencies of the drive and sense vibrational modes for improving the sensitivity. For this end, the natural frequencies can be tuned by voltages. In this study, a new model is utilized to determine the natural frequencies of the doubly clamped beam microgyroscope. In the model, nonlinear electrostatic forces, fringing fields and mid-plane stretching of thebeam are considered. The system is actuated and sensed by electrostatic force and its natural frequencies and stiffness are detuned by DC voltages. The oscillatory problem of the gyroscope is analytically solved versus DC voltages for different design parameters. Copyright  

With the successes in numerous applications from signal filtering to chemical and mass sensing, micro- and nano-electro-mechanical resonators continue to be one of the most widely studied topics of the micro-electro-mechanical systems community. Nonlinearities arising out of different sources such as mid-plane stretching and electrostatic force lead to a rich nonlinear dynamics in the time response of these systems which should be investigated for appropriate design and fabrication of them. Motivated by this need, present study is devoted to analyzing the nonlinear dynamics and chaotic behavior of nano resonators with electrostatic forces on both sides. Based on the potential function and... 

Microcantilever beams are frequently utilized in microelectromechanical systems. The operational range of microcantilever beams under electrostatic force can be extended beyond pull-in in the presence of an intermediate dielectric layer, which has a significant effect on the behavior of the system. Three possible configurations of the beam over the operational voltage range are floating, pinned, and flat configurations. In this paper, a systematic method for deriving dynamic equation of microcantilevers for all configurations is presented. First, a static study is performed on deflection profile of the microcantilever under electrostatic force. After that, a polynomial approximate shape... 

The nonlinear dynamic and static deflection of a micro/nano gyroscope under DC voltages and base rotation are investigated. The gyroscope undertakes two coupled bending motions along the drive and sense directions and subjected to electrostatic actuations and intermolecular forces. The nonlinear governing equations of motion for the system with the effect of electrostatic force, intermolecular tractions and base rotation are derived using extended Hamilton principle. Under constant voltage, the gyroscope finds the preformed shape. First, the deflection of the micro/nano gyroscope under electrostatic forces is obtained by static and dynamic analyses. Furthermore, the static and dynamic... 

In this study, the static deflection and pull-in instability of the doubly clamped microbeam with a mass attached to its midpoint are investigated. Nonlinear electrostatic forces, fringing fields, base rotation and mid-plane stretching of the beam in this model are considered. First, a system of two nonlinear integro-differential equations are expressed in partial derivatives which describe coupled flexural-flexural motion of electrostatically actuated microbeam gyroscopes under rotation. Then static deflection and pull-in instability of the microgyroscopes acted upon by DC voltages in both (direction and sensing) directions are studied. The equations of static motion are reduced by... 

Cantilever arrays with nearest-neighbor interactions are considered to obtain the pull-in parameters. The interactions between the neighboring beams are a combination of the Casimir force and the electrostatic force with the first-order fringing field correction. A set of coupled nonlinear boundary value problems and a set of coupled nonlinear equations arise in the distributed and lumped parameter modeling of the array, respectively. The models are simulated numerically to obtain the pull-in parameters of the arrays with different number of beams. The pull-in parameters of large arrays converge to constant values, which are independent of the number of beams in the array. The constants... 

Piezoelectric materials are extensively applied for vibrational energy harvesting especially in micro-scale devices where other energy conversion mechanisms such as electromagnetic and electrostatic methods encounter fabrication limitations. A cantilevered piezoelectric bimorph beam with an attached proof (tip) mass for the sake of resonance frequency reduction is the most common structure in vibrational harvesters. According to the amplitude and frequency of applied excitations and physical parameters of the harvester, the system may be pushed into a nonlinear regime which arises from material or geometric nonlinearities. In this study nonlinear dynamics of a piezoelectric bimorph harvester... 

In this paper, primary resonance of a double-clamped microbeam has been investigated. The Microbeam is predeformed by a DC electrostatic force and then driven to vibrate by an AC harmonic electrostatic force. Effects of midplane stretching, axial loads and damping are considered in modeling. Galerkin's approximation is utilized to convert the nonlinear partial differential equation of motion to a nonlinear ordinary differential equation. Afterward, a combination of homotopy perturbation method and the method of multiple scales are utilized to find analytic solutions to the steady-state motion of the microbeam, far from pull-in. The effects of different design parameters on dynamic behavior... 

Piezoelectric materials are extensively applied for vibrational energy harvesting especially in micro-scale devices where other energy conversion mechanisms such as electromagnetic and electrostatic methods encounter fabrication limitations. A cantilevered piezoelectric bimorph beam with an attached proof (tip) mass for the sake of resonance frequency reduction is the most common structure in vibrational harvesters. According to the amplitude and frequency of applied excitations and physical parameters of the harvester, the system may be pushed into a nonlinear regime which arises from material or geometric nonlinearities. In this study nonlinear dynamics of a piezoelectric bimorph harvester... 

The objective of this paper is to investigate dynamical pull-in behavior of an electrostatic actuated nano-device based on Eringen's nonlocal elasticity theory. The Euler–Bernoulli beam model is used to establish the dynamic equation of motion of the nano-device subjected to both electrostatic and intermolecular forces. The nanobeam is considered with axially immovable ends and the geometrically nonlinearity due to mid-plane stretching is incorporated to the model as well. A new intermolecular attractive force model based on the macroscopic interactions of a circular cross section nanobeam and a flat surface is presented for the carbon nanotube based nano-device. The nonlinear static...