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Nonlinear dynamics of electrostatically actuated micro-resonator: Analytical solution by homotopy perturbation method

Tajaddodianfar, F ; Sharif University of Technology

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  1. Type of Document: Article
  2. DOI: 10.1109/AIM.2014.6878259
  3. Abstract:
  4. Dynamic behavior of a electrostatically actuated MEMS resonator is investigated. A double clamped micro-beam under distributed DC and AC actuation is used. Corresponding single degree of freedom model is derived using Galerkin's decomposition method. Homotopy Perturbation Method (HPM) is implemented in order to derive analytical expression for frequency response of the micro-resonator. Comparison of the obtained results with the numerical simulations confirms that HPM agrees very well with numerical simulations for a wide range of parameters. Obtained analytical solution can be used for design and optimization of MEMS resonators
  5. Keywords:
  6. Computer simulation ; Crystal resonators ; Electrostatic actuators ; Frequency response ; Intelligent mechatronics ; Numerical models ; Analytical expressions ; Decomposition methods ; Design and optimization ; Dynamic behaviors ; Homotopy Perturbation Method (HPM) ; MEMS resonators ; Micro resonators ; Single degree of freedom models ; Microelectromechanical devices
  7. Source: IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM ; July , 2014 , p. 1284-1289
  8. URL: http://ieeexplore.ieee.org/xpl/login.jsp?tp=&arnumber=6878259&url=http%3A%2F%2Fieeexplore.ieee.org%2Fxpls%2Fabs_all.jsp%3Farnumber%3D6878259