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Optimal PID control of a nano-Newton CMOS-MEMS capacitive force sensor for biomedical applications
, Article Mechanics and Industry ; Vol. 15, issue. 2 , January , 2014 , p. 139-145 ; Ghafari, A. S ; Sharif University of Technology
Abstract
This paper presents closed loop simulation of a CMOS-MEMS force sensor for biomedical applications employing an optimal proportional-integral-derivative controller. Since the dynamic behavior of the sensor under investigation is nonlinear the iterative feedback tuning approach was proposed for optimal gains tuning of the proposed controller. Simulation results presented in this research illustrate that the proposed controller suppresses the undesired in-plane vibration induced by environment or gripper 40 times faster than the nonlinear controller proposed in the literature. To suppress the maximum input disturbance the maximum voltage was approximately 18 V which was less than the pull-in...
Design of electrostatic actuators for suppressing vertical disturbances of CMOS-MEMS capacitive force sensors in bio applications
, Article Mechanics and Industry ; Volume 16, Issue 3 , 2015 ; 22577777 (ISSN) ; Selk Ghafari, A ; Khayyat, A. A ; Sharif University of Technology
EDP Sciences
2015
Abstract
The objective of this work is to design electrostatic actuators for a CMOS-MEMS nano-newton capacitive force sensor to suppress vertical vibrations disturbances. Electrostatic actuators are selected because the movable part of this force sensor is anchored to the fixed parts. In the first step, we propose a framework for simulation of the force sensor based on finite element method. The proposed model is modified utilizing comparison between the simulation and experimental models to improve the performance of the model. Then, 14 pairs of electrostatic actuators are designed for applying the control algorithm and their pull-in voltage is calculated. In next step, Modal Analysis is applied to...
Active vibration control of a cmos-mems nano-newton capacitive force sensor for bio application using PZT
, Article Advanced Materials Research, San Diego, CA ; Volume 628 , 2013 , Pages 317-323 ; 10226680 (ISSN) ; 9783037855706 (ISBN) ; Selkghafari, A ; Zabiholah, A ; Meghdari, A ; Sharif University of Technology
Abstract
This paper reports the design of an optimal controller to prevent suppressvertical vibration due to undesired out of plane excitations generated by environment or gripper during manipulation for a CMOS-MEMS Nano-Newton capacitive force sensor applied for biomedical applications. Undesired out of plane excitations generated by environment or gripper during manipulation is the most prevalent source of vertical vibration in this type of sensors. To suppress the vibrational movement a PZT 5A is used as actuation mechanism. Discrete element method DEM model and Modal analysis were used to find dominant natural frequencies and mode shape vectors. To eliminate out of plane excitation an optimal...